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Re-Entrant , Fused Silica

Leak Rate:                                    <2x10(-10) atm cc/sec He  

Parallelism:                                   

    UV Grade:                                <30 Arc Minutes

    DUV Grade:                              <10 Arc Seconds

Flange Material:                            304/316 Stn. Stl.

Flatness:                                      

DUV Grade:                                  l /4 @ 632nm Transmitted Wavefront

Surface Finish:                            

    UV Grade:                                40/20 Scratch/Dig

    DUV Grade:                             20/10 Scratch/Dig                              

Thermal Range:                            -100 to 200C

Material:                                       Corning HPFS 7980 Fused Silica

Transmission

    UV Grade:                               >90% @ 250nm (external)

    DUV Grade                              >99.8% @ 248nm (internal)

Homogeneity Grade:

    UV Grade                                F

    DUV Grade                             A

Inclusion Class:

    UV Grade                                2

    DUV Grade                             0

Operating Conditions  

The thermal ratings specified are safe operating limits determined by various factors including

material properties, mechanical design, and the intended operating environment. Temperature

ratings for various mounting options may reduce the operating range of a window assembly.

All assemblies have a maximum thermal gradient of 25ºC per minute and may be damaged if

this limit is exceeded.